Fundamental Principles ofOptical Lithography2007 John Wiley Sons,Ltd.ISBN:978-0-470-01893-4FundamentalPrinciples of OpticalLithography:The Science ofMicrofabricationCHRIS MACKwww.lithoguru.com1807WILEY2007John Wiley Sons,LtdCopyright©2007John Wiley Sons Ltd,The Atrium,Southem Gate,Chichester.West Sussex PO19 8SQ.EnglandTelephone(+44)1243779777Email (for orders and customer service enquiries):cs-books@wiley.co.ukVisit our Home Page on www.wileyeurope.com or www.wiley.comAll Rights Reserved.No part of this publication may be reproduced.stored in a retrieval system ortransmitted in any form or by any means,electronic,mechanical,photocopying.recording,scanning orotherwise,except under the terms of the Copyright,Designs and Patents Act 1988 or under the terms of alicence issued by the Copyright Licensing Agency Ltd,90 Tottenham Court Road,London WIT 4LP,UKwithout the permission in writing of the Publisher.Requests to the Publisher should be addressed to thePermissions Department,John Wiley Sons Ltd,The Atrium,Southern Gate,Chichester,West SussexPO19 8SQ,England,or emailed to permreq@wiley.co.uk,or faxed to (+44)1243 770620.Designations used by companies to distinguish their products are often claimed as trademarks.All brand names and productnames used in this book are trade names,service marks,trademarks or registered trademarks of their respective owners.ThePublisher is not associated with any product or vendor mentioned in this book.This publication is designed to provide accurate and authoritative information in regard to the subject matter covered.It issold on the understanding that the Publisher is not engaged in rendering professional services.If professional advice or otherThe Publisher and the Author make no representations or warranties with respect to the accuracy or completeness of thecontents of this work and specifically disclaim all warranties,including without limitation any implied warranties of fitnessfor a particular purpose.The advice and strategies contained herein may not be suitable for every situation.In view ofongoing research,equipment modifications,changes in governmental regulations,and the constant flow of infommationrelating to the use of experimental reagents,equipment,and devices,the reader is urged to review and evaluate theinfommation provided in the package insert or instructions for each chemical,piece of equipment,reagent,or device for,among other things,any changes in the instructions or indication of usage and for added warnings and precautions.The factthat an organization or Website is referred to in this work as a citation andor a potential source of further information doesnot mean that the author or the publisher endorses the information the organization or Website may provide or recommenda-tions it may make.Further,readers should be aware that Intemet Websites listed in this work may have changed ordisappeared between when this work was written and when it is read.No warranty may be created or extended by anypromotional statements for this work.Neither the Publisher nor the Author shall be liable for any damages arising herefrom.Other Wiley Editorial OfficesJohn Wiley Sons Inc..111 River Street,Hoboken,NJ 07030.USAJossey-Bass,989 Market Street,San Francisco,CA 94103-1741,USAWiley-VCH Verlag GmbH,Boschstr.12,D-69469 Weinheim,GemmanyJohn Wiley Sons Australia Ltd,42 McDougall Street,Milton,Queensland 4064,AustraliaJohn Wiley Sons (Asia)Pte Ltd,2 Clementi Loop #02-01,Jin Xing Distripark.Singapore 129809John Wiley Sons Ltd,6045 Freemont Blvd,Mississauga,Ontario L5R 4J3,CanadaWiley also publishes its books in a variety of electronic formats.Some content that appears in print may not be available inelectronic books.Anniversary Logo Design:Richard J.PacificoBritish Library Cataloguing in Publication DataA catalogue record for this book is available from the British LibraryISBN9780-470-01893-4Typeset by SNP Best-set Typesetter Lid,Hong KongPrinted and bound in Great Britain by Antony Rowe Ltd.,Chippenham,WiltshireThis book is printed on acid-free paper responsibly manufactured from sustainable forestry in which at least two trees areplanted for each one used for paper production.