AppendixReference Data for the EUVSpectral Region*Eric M.Gullikson and David AttwoodLawrence Berkeley National Laboratory,Berkeley,California,USAA.1 IntroductionReferencesA.1 IntroductionBasic equations and data for the interaction of EUV radiation with materialsis presented.The complex refractive index and penetration of EUV radiationinto materials is presented in terms of the real and imaginary parts of theatomic scattering factors for various atoms of common interest.Thesescattering factors are presented graphically as a function of photon energy,with sample tabulated values.Full access for all elements,and samplecalculation routines for compound materials,are referred to the CXROwebsite.Basic physical constants from the NIST website are also given.Tabulations of electron binding energies and characteristically emitted photonenergies are presented in tables for all natural elements.*This Appendix has not be updated from the first edition of this book (2009)689690AppendixTable A.1Optical constants and absorption data for extreme ultraviolet wavelengths.1.2C(barns/atom)=u(cm2/g)x 14.97Beryllium (Be)EkeV)u(cm2g)=×4669.04Z=4Atomic weight 9.012Energy(eV)301.7874.396E016.841E+04701.6692.497E011.666E+0481000.6471.591E017.431E+033004.3331.150E+001.790E+0447004.2172.571E011.715E+0310004.1401.282E015.986E+0230004.0261.360E022.117E+01070004.0052.106E031.405E+00100004.0039.384E044.381E014300004.0007.379E051.148E0210100100010000101010101010010001000010100100010000E(ev)E(ev)Edge Energies:K(barns/atom)=u(cm2/g)x 19.95Carbon(C)EkeVμ(cm2g)=×3503.31Atomic weight 12.011Energy(eV)303.6922.664E+003.111E405704.2491.039E+005.201E+041004.2536.960E-012.438E+H043002.7033.923E+004.581E+047006.3161.174E+005.878E+0310006.3326.328E012.217E0330006.0977.745E-029.044E+01070006.0251.306E026.536E00100006.0135.892E032.064E+004300006.0004.425E045.168E-021010010001000010101021010°1021020100100010000100100010000E(ev)Edge Energies:K284.2eV(continued)